摘要

In this work, amplitude modulation atomic force microscopy (AM-AFM) based on the higher flexural modes of the microcantilever is investigated by a numerical approach. The amplitude-distance and phase-distance curves for the first four flexural modes are obtained and compared. The dependence of phase on elastic modulus and viscosity of the sample is analyzed. Results show that a higher flexural mode yields a larger amplitude and phase in the repulsive regime and reduces the bistability, but causes a larger sample deformation and peak repulsive force. Compared to that of a lower flexural mode, the phase of a higher flexural mode provides higher sensitivity to viscosity variation for relatively large moduli.

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