Directed Self-Assembly of Block Copolymers on Two-Dimensional Chemical Patterns Fabricated by Electro-Oxidation Nano lithography

作者:Xu Ji; Park Soojin; Wang Shiliu; Russell Thomas P*; Ocko Benjamin M; Checco Antonio
来源:Advanced Materials, 2010, 22(20): 2268-+.
DOI:10.1002/adma.200903640

摘要

A hexagonal web of carboxylic-terminated nanostripes (left image, bright areas) is patterned onto a methyl-terminated surface of an octadecyltrichlorosilane monolayer. A thermally annealed polystyrene-block-poly(ethylene oxide) (PS-b-PEO) thin-film, spin-cast on the chemical pattern (right image), exhibits surface normal oriented cylindrical PEO microdomains on the methyl-terminated regions only. These chemical patterns effectively template the order and spatial orientation of diblock-copolymer microdomains.

  • 出版日期2010-5-25