Nanoindentation study of magnetron-sputtered CrN and CrSiN coatings

作者：Shah Hetal N; Jayaganthan R^*; Pandey Avinash C

来源：Materials & Design, 2011, 32(5): 2628-2634.

DOI：10.1016/j.matdes.2011.01.031

• Coatings
• Mechanical
• Microstructure

CrN and CrSiN coatings were deposited on stainless steel substrate by reactive magnetron sputtering. The coatings were characterized for phases, chemical composition, microstructure, and mechanical properties by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM)/energy dispersive spectroscopy (EDS), atomic force microscopy (AFM), and nanoindentation technique, respectively. The cubic phase was the only phase observed in both the coatings as observed in XRD results. A dense morphology was observed in these coatings deposited with high nitrogen and Si contents, 50:50 and 18.65 at.%, respectively. Nanoindentation measurement of CrN coatings, with Ar + N(2) proportions of 60:40, showed maximum hardness (H) and modulus (E) of 21 +/- 0.85 GPa and 276 +/- 13 GPa, respectively. The CrN coatings deposited in pure N(2) atmosphere showed H and E values of 27 +/- 1.62 and 241 +/- 10 GPa, respectively. The measured H and E values of CrSiN coatings were found to be 28 +/- 1.40 GPa and 246 +/- 10 GPa, respectively. The improved hardness in both the coatings was attributed mainly to a reduction in crystallite size, decrease in surface roughness, and dense morphology. The incorporation of Si into the CrN coatings has improved both hardness and Young's modulus.

• 出版日期2011-5