摘要

Nano-sized Copper (Cu) particles and rods were prepared by annealing Cu-Zr, and Cu-Al-Zr composite films on polyimide substrates. XRD, FESEM and EDS were used to characterize their microstructure and composition. Results show that faceted Cu particles are regular and pure Cu element. Furthermore, it was interesting to find that Cu nanorods might appear on the surface of annealed Cu-Al-Zr composite thin films. Based on the experimental results and analysis, it were speculated that these Cu particles are single crystals. The particle average sizes are closely related to the content of Zr as well as annealing temperature and atmosphere. This work may provide a new approach to prepare metal particles and nanorods on the surface of Cu composite films on polyimide substrates.