Development and characterization of a high-sensitivity fiber Bragg grating-based vibrating nano-probe for 3D measurement

作者：Liu, Fangfang^*; Wang, Jingfan; Chen, Lijuan; Li, Ruijun; Xia, Haojie; Yu, Liandong

来源：Sensor Review, 2019, 39(2): 199-207.

DOI：10.1108/SR-06-2017-0122

• Dynamic
• Demodulation
• Fiber Bragg grating sensor
• Nano-coordinate measuring machine
• Probe

Purpose There is an increasing demand for higher-accuracy dimensional measurements of nano- and micro-structures. Recently, the authors presented a fiber Bragg grating (FBG) sensor-based dynamic nano-coordinate-measuring machine (CMM) probe for true three-dimensional coordinate measurement, in which a specific mechanical structure with several FBG sensors was developed to provide the probe with sensitivity to loading in all directions.
Design/methodology/approach The study presents a three-dimensional sensing and demodulation system based on an improved matched filter design and the time division multiplexing technique that helps solve the problem of multiplex FBG-signals conflicts. In addition, the application of the dynamic mode of the probe system effectively solves the problem presented by the surface interaction forces.
Findings Consequently, this FBG-based vibrating probe system has increased sensitivity to strain, while maintaining smaller contact force. The experiments for testing probe performance show that the prototype yielded a measurement resolution of 13 nm, a repeatability of 50 nm and a vertical measurement force of less than1.5 mN.
Research limitations/implications The force tests in the horizontal directions are difficult to conduct because both the probe and the dynamometer are only adaptable to vertical use.
Practical implications Development of the FBG-based dynamic nano-coordinate-measuring machine probe will achieve a new and inexpensive method for higher-accuracy dimensional measurements of nano- and micro-structures, such as micro-electromechanical systems, micro-fluidic chips, inkjet and diesel engine injector nozzles that are in overall dimensions within the micrometer scale.
Originality/value The study presents a three-dimensional sensing and demodulation system for the vibrating nano-coordinate-measuring machine probe based on FBG sensors. The prototype yielded a measurement resolution of 13 nm, a repeatability of 50 nm and a vertical measurement force of less than1.5 mN.

• 出版日期2019-3-7
• 单位合肥工业大学