Disc type thermal actuator with straight beams for angular motion

作者：Anwar M Arefin; Packirisamy Muthukumaran^*; Ahmed A K Waiz

来源：Applied Thermal Engineering, 2013, 51(1-2): 988-999.

DOI：10.1016/j.applthermaleng.2012.09.036

• Rotary type micro thermal actuator
• Rotary motion
• Optical MEMS
• MEMS testing

Motion of a micro thermal actuator largely depends on its structural topology. This paper presents designs for a novel rotary type micro thermal actuator. This actuator has unique arrangement of hot segments around the cold segment. Upon application of potential difference, hot segments expand against the cold segment of disc and make the cold disc rotate about its center. This rotary motion can be used for various optical applications like, switching, attenuation and diffraction. The actuator has been fabricated using poly MUMPS process technology. An analytical model was used for predicting steady state temperature profile along the actuator length and rotational behavior of the cold disc under different applied voltages. A finite element analysis (FEA) was carried out to predict the behavior of the actuator by defining an air volume around the structure and also between structure and substrate. Finally testing was done for predicting feasibility of the actuator. Comparison of the rotational behavior obtained from both analytical model and FEA with that of obtained from testing shows close agreement.

• 出版日期2013-3