Modeling and simulation of a suspended microchannel resonator nano-sensor

作者：Zakeri Manizhe^*; Sahebari Seyed Mahmoud Seyedi

来源：Microsystem Technologies, 2018, 24(2): 1153-1166.

DOI：10.1007/s00542-017-3478-6

In this paper, dynamic behavior of a piezoelectric sensor based on the suspended microchannel resonator (SMR) was modelled and simulated. Dynamic behavior of SMR with optical and piezoelectric sensing was studied. Simulation was performed using two methods of distributed parameters model (DPM) and discontinuous beam model (DBM). Sensitivity of biosensor was analyzed for changing of added mass. Finally, an applicable case study was proposed. Simulation results showed that natural frequencies variation for optical and piezoelectric SMRs are equal to almost 11 kHz/(kg/m(3)) and 20 kHz/(kg/m(3)), respectively, and piezoelectric SMR is more sensitive for studied case study. In addition, 40 samples were generated randomly by using the Matlab software to study accuracy of the DPM and DBM analysis methods. Results showed that less proportional between the length of the microcantilever and piezoelectric layer, led to increase of the required number of Eigen functions to receive acceptable answer with DPM. Moreover, by increasing of the neutral axis displacement, the accuracy of DBM method decrease in comparison with DPM. In the piezoelectric SMR, the amplitude of output voltage declined more than ten times by using different fluids in channel of water instead of air.

• 出版日期2018-2