科研之友
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摘要
A general form of the non-local equation for an ionization source in glow discharge and hollow cathode 3D-simulation is formulated. It is a fundamental equation in hollow cathode theory, which allows formulation of a complete set of field equations for a self-consistent problem in a stationary glow discharge and hollow cathode. It enables us to describe the region of negative glow and the hollow cathode effect and compare calculation results of electrical dependencies (pressure-voltage) with experimental data, - under conditions of gradual appearance of the hollow cathode effect.
- 出版日期2010-8
