A Study on Frequency-Dependent Voltage Nonlinearity of SrTiO3 rf Capacitor

作者：Cheng C H^*; Huang C C; Hsu H H; Chen P C; Chiang K C; Chin Albert; Yeh F S

来源：Electrochemical and Solid-State Letters, 2010, 13(12): H436-H439.

DOI：10.1149/1.3491490

In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-kappa Ni/SrTiO3/TaN and TaN/SrTiO3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

• 出版日期2010
• 单位中国科学院电工研究所; 清华大学