High-Performance Electrolyte-Insulator-Semiconductor pH Sensors Using High-k CeO2 Sensing Films

作者：Pan Tung Ming^*; Wang Chih Wei; Pan Sheng Yu

来源：IEEE Electron Device Letters, 2015, 36(11): 1195-1197.

DOI：10.1109/LED.2015.2475627

• Electrolyte-insulator-semiconductor (EIS)
• CeO2
• sensor

In this letter, we developed a high-performance electrolyte-insulator-semiconductor (EIS) sensor using a high-k CeO2 sensing membrane, which was deposited on a Si substrate through sputtering. We used X-ray diffraction and X-ray photoelectron spectroscopy to study the structural properties of these films that were annealed at various temperatures. The CeO2 EIS sensor annealed at 900 degrees C exhibited a higher sensitivity of 64.8 mV/pH, lower hysteresis voltage of 1 mV, and smaller drift rate of 0.78 mV/h compared with other annealing temperatures, presumably suggesting the formation of a well-crystallized CeO2 film featuring a high dielectric constant and having a high fraction of Ce3+.

• 出版日期2015-11
• 单位长春大学