Narrowband multispectral filter set for visible band

作者：Walls K^*; Chen Q; Grant J; Collins S; Cumming D R S; Drysdale T D

来源：Optics Express, 2012, 20(20): 21917-21923.

DOI：10.1364/OE.20.021917

We design, fabricate and characterise a narrowband Fabry-Perot multispectral filter set for the visible range (400-750nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.

• 出版日期2012-9-24