Morphology and chemical composition analysis of inorganic nanosheets by the field-emission scanning electron microscope system

作者：Li Qinghui; Ono Yuki; Homma Yoshikazu; Nakai Izumi^*; Fukuda Katsutoshi; Sasaki Takayoshi; Tanaka Keiichi; Nakayama Satoshi

来源：Journal of Electron Microscopy, 2009, 58(1): 1-6.

DOI：10.1093/jmicro/dfn031

• nanosheets
• field-emission scanning electron microscope
• accelerating voltage
• solid-state detector
• transition edge sensor

Nanosheets can be used as building blocks to fabricate versatile nanostructured materials. In this paper, morphology of the Cs(4)W(11)O(36) and Nb(3)O(8) and TaO(3) sheets with different layers are analyzed by different field-emission scanning electron microscopes (FE-SEMs). Chemical composition of the single-layered Cs(4)W(11)O(36) with thickness of about 2 nm, and multilayered Nb(3)O(8) nanosheets with thickness of less than 14 nm are analyzed by both the Si(Li) solid-state detector and transition edge sensor (TES) microcalorimeter, successfully. The effects of energy resolution, accelerating voltage and substrate on the quantitative analysis are discussed briefly.

• 出版日期2009-1