Automated control system of a molecular-beam epitaxy setup

作者：Kazakov I P^*; Tsekhosh V I; Igonin M E; Fofanova L A; Shemyakin S N

来源：Bulletin of the Lebedev Physics Institute, 2010, 37(5): 131-135.

DOI：10.3103/S1068335610050027

• automated control system
• semiconductor heterostructure growth
• epitaxy

An automated control system for epitaxial facilities was developed based on the Advantech Co. software and hardware.

• 出版日期2010-5