A model for quantification of GDOES depth profiles

作者：Liu Y; Yu W H; Wang J Y^*

来源：Vacuum, 2015, 113: 5-10.

DOI：10.1016/j.vacuum.2014.11.015

• GDOES depth profiling
• MRI model
• CRAS model
• Roughness
• Crater effect
• Preferential sputtering

The MRI (Mixing-Roughness-Information depth) model and the CRAS (Crater-Simulation) model are combined for the quantification of GDOES (glow discharge optical emission spectroscopy) depth profile by taking into account the effects of crater, roughness and preferential sputtering in depth profiling. This combined model is successfully applied for the quantification of the measured GDOES depth profiles of N in a nitride coating and of Ni in a Ni-coated copper substrate.

• 出版日期2015-3
• 单位汕头大学