Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors

作者：Matsuyama Satoshi^*; Emi Yoji; Kino Hidetoshi; Kohmura Yoshiki; Yabashi Makina; Ishikawa Tetsuya; Yamauchi Kazuto

来源：Optics Express, 2015, 23(8): 9746-9752.

DOI：10.1364/OE.23.009746

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with similar to 100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.

• 出版日期2015-4-20
• 单位RIKEN