Compact tool for deposition of composition spread alloy films

作者：Priyadarshini Deepika; Kondratyuk Petro; Miller James B; Gellman Andrew J^*

来源：Journal of Vacuum Science and Technology A, 2012, 30(1): 011503.

DOI：10.1116/1.3664078

Composition spread alloy films (CSAFs) are combinatorial materials libraries that contain broad, continuous composition ranges of binary or higher-order alloys on a single, compact substrate. When characterized for composition and functional properties using spatially resolved methods, CSAF libraries enable rapid determination of composition-property relationships across broad continuous regions of alloy composition space. In this report, we describe the design and operation of a novel offset filament deposition tool for preparation of CSAFs. The spatial distribution of individual alloy component fluxes to the substrate surface, and thus the film composition across the substrate, is controlled by the location and temperature of chemically distinct evaporative line sources. The tool can be used for quantitative deposition of thin (<= 100 nm) CSAFs with up to four components. The authors demonstrate the performance of the tool by applying it to preparation of 100 nm thick Pd-Cu CSAFs, with lateral composition gradients that span the range Cu(0.05)Pd(0.95) to Cu(0.95)Pd(0.05), on a 12 mm diameter Mo(110) substrate.

• 出版日期2012-1