Dust grain charging in RF discharges

作者:Bacharis M*; Coppins M; Allen J E
来源:Plasma Sources Science and Technology, 2010, 19(2): 025002.
DOI:10.1088/0963-0252/19/2/025002

摘要

In this work modifications of the orbital motion limited approach are used to investigate the impact of time varying phenomena on the floating potential of a dust grain. The main interest is focused on different regimes relevant for RF discharges. Three cases are considered. First, the case of the RF sheath. Second, the case of charging in the bulk plasma with a time varying electric field and third, the case when the time varying current in the bulk plasma is carried only by a fraction of the electron population. This last case is relevant to low pressure discharges when stochastic heating is important.

  • 出版日期2010-4