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摘要
A new continuous diffusion furnace is introduced in this paper and its workflow is briefly discussed. Within the analysis and statement about the diffusion principle, both junction depth and sheet resistivity are studied. Numerical analysis has been performed to simulate the temperature distribution in the furnace, with FLUENT software. Finally the values of sheet resistivity are calculated according to both temperature field models of continuous and traditional diffusion furnace respectively. Therefore, the new continuous diffusion furnace is proved to be feasible by the comparison of these values.
- 出版日期2013
- 单位上海大学
