摘要

An atmospheric glow microplasma is generated in the hollow core of microns-thick optical fibers (>1 m long) when the sinusoidal voltage with a peak voltage of 5 kV and a frequency of 5.0 kHz is applied to these microelectrodes along the outside of optical fibers. Measurements show that the atmospheric glow microdischarge consists of current pulses with amplitudes of tens of amperes and pulse widths of several microseconds. Atmospheric surface barrier discharges are formed along the inner surface of hollow optical fibers between adjacent microelectrodes, which results in the pulsed glow microdischarges. By flowing octafluorocyclobutane (c-C4F8)/helium (He) mixtures through the hollow-core optical fiber, fluorocarbon polymer (FCP) coatings are deposited on the inner surface of the > 1 m long optical fiber. Analysis indicates that the glow microdischarge contributes to the uniform deposition of FCP coatings on the inner surface of hollow fibers. The in situ optical emission measurements show that various carbon-containing species, such as CF2, CN, and C-2 are generated in the visually uniform microplasmas. The discharge mechanism is discussed based on the I-V and optical emission measurements and FCP coating characterizations.