Mechanical properties measured by nano-indentation of Pb(Zr, Ti)0(3) sol-gel films deposited on Pt and LaNi0(3) electrodes

作者：Delobelle P^*; Wang G S; Fribourg Blanc E; Remiens D

来源：Surface and Coatings Technology, 2006, 201(6): 3155-3162.

DOI：10.1016/j.surfcoat.2006.06.034

• nano-indentation
• ferroelectric ceramic
• sol-gel
• Young's modulus
• hardness

The crystallographic orientation of PZT films is related to the orientation of the substrate (electrode) and the process parameters. In this study, the PZT films are deposited by sol-gel on silicon substrate with different bottom electrodes: TiOx/Pt and LaNiO3. In terms of sol-gel process we have modified the precursor concentration and the type of solvent. All these parameters affect the crystallite orientation. Nano-indentation tests coupled with continuous stiffness measurements allowed to obtain the M-< hk1 >, elastic modulus and the hardness H-b < hk1 > of these films. From the present study and from the literature, it is clearly shown that the mechanical properties greatly depend on the crystalline orientation. A compilation of all the reported data allows us to propose the values of M <(hk1 >), and Hb <(hk1 >) for the three characteristic orientations (001), (111) and (110).

• 出版日期2006-12-4