Development and application of micromachined Pd/SnO2 gas sensors with zeolite coatings

作者：Vilaseca M; Coronas J; Cirera A; Cornet A; Morante J R; Santamaria J^*

来源：Sensors and Actuators B: Chemical , 2008, 133(2): 435-441.

DOI：10.1016/j.snb.2008.03.002

• microsensors
• zeolite coatings
• SnO2
• gas sensor selectivity

Zeolite A (LTA)-coatecl micromachined sensors have been prepared and used in the sensing of individual gases (H-2, CH4, C2H5OH, C3H8 and CO, in the 10-1000 ppm range) and gas mixtures. Unlike previous Works with conventional sensors, a hydrothermal synthesis was not Used to prepare a zeolite film. Instead, a zeolite coating was formed on top of the Pd/SnO2 surface by microdropping from a zeolite suspension. In spite of this, the response of the sensor with zeolite is significantly different from that of unmodified sensors, and essentially reproduces the performance of zeolite-coated conventional sensors. By avoiding the use of a hydrothermal synthesis the integrity of the sensor is better preserved, and the resulting non-continuous zeolite film has the added advantage of a strong reduction in response times.

• 出版日期2008-8-12