Applications of porous silicon formed by electrochemical etching using an electrolyte based on HF:formaldehyde

作者：De La Luz Merino S; Morales Morales F; Mendez Blas A; Calixto M E^*; Nieto Caballero F G; Garcia Salgado G

来源：Applied Physics A-Materials Science & Processing, 2013, 111(4): 1077-1083.

DOI：10.1007/s00339-012-7529-7

In this work, we report the experimental results on the formation of porous silicon (PSi) monolayers by electrochemical etching using a formaldehyde based electrolyte. The results were compared with PSi monolayers obtained with the traditional electrolyte (HF:ethanol). Both electrolytes facilitate the removal of H-2 generated as a subproduct during the electrochemical etching process in the surface of the c-Si substrate. Formaldehyde presents a good affinity to surfaces and interfaces and the excess of water in the electrolyte reduces the pore sizes of PSi samples. The porosity and etching rate values are similar than those obtained using HF:et solutions. The refractive index values are the same in both cases at the same porosity in the visible range. The results have shown that the chemical characteristics of the ethanol and formaldehyde can give some different advantages to the PSi process and its applications.

• 出版日期2013-6