Analysis of Nonlinear Phenomena in a Thermal Micro-Actuator with a Built-In Thermal Position Sensor

作者：Bazaei Ali^*; Zhu Yong; Moheimani Reza; Yuce Mehmet Rasit

来源：IEEE Sensors Journal, 2012, 12(6): 1772-1784.

DOI：10.1109/JSEN.2011.2178236

• Analytical models
• electrothermal position microsensor
• nonlinear analysis
• thermoelectric microactuators

An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.

• 出版日期2012-6