作者：Grinberg E E*; Ukhin V I; Rakhlin V I; Ryabtseva M V; Levin Yu I; Strel'nikova I E
来源：Russian Journal of Applied Chemistry, 2011, 84(11): 1909-1913.
DOI：10.1134/S1070427211110127
摘要
We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods.
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