Dual-wavelength digital holography with a single low-coherence light source

作者：Jeon Sungbin; Cho Janghyun; Jin Ji Nan; Park No Cheol^*; Park Young Pil

来源：Optics Express, 2016, 24(16): 18408-18416.

DOI：10.1364/OE.24.018408

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro-and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.

• 出版日期2016-8-8