Determination of Current Density Suppression Ability of Poly(ethylene glycol) during Copper Electrodeposition by an Electrochemical Analysis with a Microfluidic Device and an Electrochemical Quartz Crystal Microbalance

作者：Saito Takeyasu^*; Tsujimoto Yuichi; Miyamoto Yutaka; Okamoto Naoki; Kondo Kazuo

来源：Japanese Journal of Applied Physics, 2013, 52(5): UNSP 05FB03.

DOI：10.7567/JJAP.52.05FB03

The adsorption behaviour of poly(ethylene glycol) (PEG) as an additive during Cu electrodeposition was investigated using a microfluidic device. First, the current density (i) transition curves were measured by rapid exchange from the base electrolyte to electrolytes with different concentrations of additive PEG. Then, the effective surface coverage ratio (theta(EFF)) of the electrodes by PEG was obtained. Equations relating theta(EFF) and the PEG adsorption rate constant (k(a)) as a function of c(PEG) (or PEG flux, u . c(PEG)) were determined from the PEG concentration (c(PEG)) and average flow velocity of the electrolyte (u) dependency. Finally, the amount of increase the weight on the electrode (Delta m) by PEG for different c(PEG) was measured using a flow cell type electrochemical quartz crystal microbalance (EQCM), and then used to calculate theta(EFF), assuming the adsorbed PEG molecules are spherical. Results revealed a strong correlation between the Delta m and a decrease in i.

• 出版日期2013-5