An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20GHz

作者：Lv Qian-Qian; Ye Han; Yin Dong-Dong; Yang Xiao-Hong; Han Qin^*

来源：Chinese Physics Letters, 2015, 32(12): 128503.

DOI：10.1088/0256-307X/32/12/128503

• PHOTODIODES
• DESIGN

We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors (ECPDs). The 10 ECPDs exhibit a uniform 3 dB bandwidth of 20 GHz and low dark current of about 1 nA at 2V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23A/W with an active region of 5 x 25 mu m(2). The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.

• 出版日期2015-12
• 单位中国科学院; 集成光电子学国家重点实验室