Nano-Structure-Controlled Very Low Resistivity Cu Wires Formed by High Purity and Optimized Additives

作者：Onuki Jin^*; Tamahashi Kunihiro; Inami Takashi; Nagano Takatoshi; Sasajima Yasushi; Ikeda Shuji

来源：IEEE Journal of the Electron Devices Society, 2018, 6(1): 506-511.

DOI：10.1109/JEDS.2018.2808494

• High purity electrolyte
• nano-structure controlled Cu wire
• optimized additives
• low resistivity

Resistivity increase in nano-level Cu wires is becoming a critical issue for high speed ULSIs. We have established a new manufacturing process utilizing very high purity 9N electrolyte and optimized additives to control nano-structures of Cu wires, and we realized Cu wires for practical use with 50% lower resistivity than those made with the conventional process. Using STEM analyses and phase field simulation, we also ascertained the reason for getting the very low resistivity Cu wires.

• 出版日期2018