摘要

The thermal effect of microcantilever-DNA biosensors is investigated by the energy method. Based on a liquid crystal theory for DNA solutions and a two-variable method for laminated cantilevers, an analytical model for nanomechanical cantilever motion under the combination of bio-interactions and thermal loadings is provided and then it is extended to T-shaped cantilevers. Then, the effects of chemo-physical properties of DNA biofilm (i.e., grafting density, nucleotide number, and ionic strength) and temperature change on deflections are discussed. In order to reduce noise signals, the controlling temperature and size optimization of cantilevers with different substrate materials and ionic strengths are also studied. Results show that SU-8 polymer cantilevers can preserve the sensitivity of molecule adsorption and thermal stability, which agrees well with the related experiments; the layer-to-layer thickness ratio of SU-8 polymer cantilevers should be as small as possible, while for silicon nitride cantilevers, there exists an optimal value. These results help to understand the sensitivity and reproducibility of biosensors.