A single-layer tilting actuator with multiple close-gap electrodes

作者:Shmilovich T*; Krylov S
来源:Journal of Micromechanics and Microengineering, 2009, 19(8): 085001.
DOI:10.1088/0960-1317/19/8/085001

摘要

We report on the design, fabrication and characterization of a novel tilting electrostatic actuator, fabricated by using a single layer of a silicon on insulator (SOI) wafer and investigate, both theoretically and experimentally, the electromechanical behavior of the device. The actuator incorporates high aspect ratio comb-like electrodes oriented in the direction parallel to the rotation axis of the tilting element. An increase in the tilting angle is accompanied by a decrease in the distance between the electrodes and by an increase of the actuating torque. Simultaneously, the overlap area between electrodes located farther apart the axis shrinks, resulting in a 'restoring' torque in the opposite direction. The electromechanical behavior and stability of the device were investigated using a simplified model of the actuator and verified by a coupled three-dimensional simulation. Model results suggest that by changing the design parameters, the actuator characteristic can be tailored in a large range. Devices of three different configurations incorporating elastic torsion axes or bending flexures were fabricated and characterized and both static and resonant responses, typical for parametrically excited nonlinear oscillators, were registered. Theoretical and experimental results indicate that the suggested architecture can be efficiently used for the static and dynamic operation of electrostatic tilting devices.

  • 出版日期2009-8