Pulsed laser deposition of tungsten-doped diamond-like carbon films

作者：Wang Xuemin; Sheng Changle; Wang Yuyn; Peng Liping; Wu Weidong^*; Tang Yongjian

来源：Optoelectronics and Advanced Materials-Rapid Communications, 2013, 7(3-4): 179-183.

• Coating materials
• Laser processing
• X-ray diffraction
• Mechanical properties

Tungsten-doped diamond-like carbon films with a total thickness about 300 nm were prepared by pulsed laser deposition (PLD) method on silicon substrates. The properties of these films were examined by X-ray diffractometer (XRD), white light interferometer, Raman spectroscopy and nanoindentation. The presence of obvious broad peaks for diffraction planes (111) indicates the formation of WC1-x phase in the films. Surface morphology confirms the smooth surface of the films (RMS: similar to 6.36 nm). The behavior of D to G peak intensity ratio has been obtained. It may result from the formation of W-C bonds. Due to the introduction of WC1-x crystallites in the matrix, optimal deposition time of tungsten leads to the highest hardness.

• 出版日期2013-4
• 单位中国工程物理研究院; 中国工程物理研究院激光聚变研究中心