A novel electrostatic based microgripper (cellgripper) integrated with contact sensor and equipped with vibrating system to release particles actively

作者：Demaghsi Hamed^*; Mirzajani Hadi; Ghavifekr Habib Badri

来源：Microsystem Technologies, 2014, 20(12): 2191-2202.

DOI：10.1007/s00542-013-1989-3

This paper presents design and simulation of a novel electrostatic microelectromechanical systems gripper with an integrated capacitive contact sensor. Moreover, this microgripper is able to employ vibration to release micro objects (cells) actively. Lateral comb drive system is used to close the gap between the gripper arms and hold the objects while the transverse comb differential capacitances act as a contact sensor to prevent damaging the fragile micron-sized particles specifically biological cells. In addition, the capability of the microgripper in generating vibration at the end-effectors electrostatically is an advantage to facilitate releasing process by overbalancing the adhesion forces between the particle and the gripper arm. Finite element analysis based simulations are carried out to estimate the behavior of the microgripper while the standard SOI-MUMPs micromachining process is proposed for fabrication of the microgripper.

• 出版日期2014-12