Nanovoid formation through the annealing of amorphous Al2O3 and WO3 films

作者：Nakamura R^*; Shudo T; Hirata A; Ishimaru M; Nakajima H

来源：Scripta Materialia, 2011, 64(2): 197-200.

DOI：10.1016/j.scriptamat.2010.09.043

• Nanoporous
• Oxides
• Amorphous
• Crystallization
• TEM

A high density of nanovoids between 2 and 13 nm in size was produced during the crystallization process when amorphous Al2O3 and WO3, which are 20-30% lower in density than their crystalline phases, were annealed. By contrast, no formation or growth of nanovoids was observed during the crystallization of amorphous TiO2, which has a density 2% lower than its crystalline phase. These results suggest that large differences in density between amorphous and crystalline oxides can be utilized to produce nanoporous structures.

• 出版日期2011-1