A direct current glow discharge plasma source for inner surface modification of metallic tube

作者：Wen Xiao Qiong^*; Yin LiYong; Wang De Zhen

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2007, 263(2): 535-537.

DOI：10.1016/j.nimb.2007.07.020

• direct current glow discharge
• inner surface modification
• metallic tube
• diamond-like carbon film

A dc glow discharge plasma source was developed for inner surface modification of metallic tubes with an inner diameter of 10 mm. A tungsten wire of 30 mu m thick was stretched inside the tube to form coaxial electrodes. DC glow discharge plasma was generated inside the tube by applying a negative high dc voltage to the tube. It was found that the length of the cylindrical plasma bulk depends linearly on the applied voltage. The electron excitation temperature of Ar plasma was measured as 12830 550 K by optical emission spectroscopy method. As a preliminary application, diamond-like carbon (DLC) films were deposited onto the inner surface of stainless steel tube of 100 mm. in length and 10 mm in inner diameter by using CH4/Ar mixture with 40% CH4 at 40 Pa pressure. The chemical structure of the DLC film deposited on the substrate was analyzed by Raman spectroscopy. The integrated intensity ratio (I-D:I-G) was obtained as 1.62 from the Raman spectra. The thickness of the DLC film deposited on the substrate was estimated as 1.5 mu m by scanning electron microscopy (SEM) observation.

• 出版日期2007-10
• 单位大连理工大学