Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations

作者：Luo Tingting; Chen Yuhang; Huang Wenhao; Gao Sitian

来源：7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, AOMATT 2014 , 2014-04-26 To 2014-04-29.

DOI：10.1117/12.2072892

• Correction method
• Drift correction
• Experimental verification
• Quantitative characterization
• Reference specimens
• Roughness surfaces
• Structural parameter
• Ultrahigh resolution

The surface roughness at micro/nano scale is essential in the quality of the optical surface. In quantitative characterization of the roughness surfaces, SPM instruments are widely used due to its ultra-high resolution and powerful performance. However, drift inevitably exist in SPM measurement and it can distort the quantitative characterization. To evaluate the SPM measurements of roughness surface more accurately, both the influence discipline of drift on random surface measurement and the development of effective correction methods need to be studied. Toward this purpose, SPM imaging of roughness surface with the presence of drift is simulated and influence discipline to roughness surface parameters was analyzed. Besides, counter-scanning correction method based on identification and matching of feature points was used to correct the roughness surface. Both simulation and experiment verified the effectiveness of the employed method. Experimental verification was conducted using roughness reference specimen with specially designed and processed structural parameters.

• 出版日期2014
• 单位中国科学技术大学