Atomic force microscope nanolithography of graphene: Cuts, pseudocuts, and tip current measurements

作者：Puddy R K^*; Scard P H; Tyndall D; Connolly M R; Smith C G; Jones G A C; Lombardo A; Ferrari A C; Buitelaar M R

来源：Applied Physics Letters, 2011, 98(13): 133120.

DOI：10.1063/1.3573802

We investigate atomic force microscope nanolithography of single and bilayer graphene. In situ tip current measurements show that cutting of graphene is not current driven. Using a combination of transport measurements and scanning electron microscopy we show that while indentations accompanied by tip current appear in the graphene lattice for a range of tip voltages, real cuts are characterized by a strong reduction in the tip current above a threshold voltage. The reliability and flexibility of the technique is demonstrated by the fabrication, measurement, modification, and remeasurement of graphene nanodevices with resolution down to 15 nm.

• 出版日期2011-3-28