Nanopatterned platinum electrodes by focused ion beam in single palladium nanowire based devices

作者：La Ferrara Vera^*; Alfano Brigida; Fiorentino Giuseppe; Polichetti Tiziana; Massera Ettore; Di Francia Girolamo

来源：Microelectronic Engineering, 2011, 88(11): 3261-3266.

DOI：10.1016/j.mee.2011.06.012

• Single palladium nanowire
• Dielectrophoresis
• Focused ion beam
• Hydrogen sensor

In this paper we present different devices, working as hydrogen sensors, based on single palladium nanowire and realized combining focused ion beam and dielectrophoresis techniques. The combination of these two techniques consists in the employ of focused ion beam for electrode patterning onto silicon/silicon dioxide substrates, followed by the assembly of a single palladium nanowire applying between electrodes an electric field at fixed frequency (dielectrophoresis) to a palladium nanoparticles solution. The nanowire morphology can be branched or not, depending on the applied frequency value. The devices are characterized in hydrogen environment at room temperature and their responses are compared.

• 出版日期2011-11