Analysis of the damage effect of femtosecond-laser irradiation on extreme ultraviolet Mo/Si multilayer coating

作者:Suman M; Monaco G*; Zuppella P; Nicolosi P; Pelizzo M G; Ferrari F; Lucchini M; Nisoli M
来源:Thin Solid Films, 2012, 520(6): 2301-2306.
DOI:10.1016/j.tsf.2011.08.109

摘要

Damage analysis of Mo/Si multilayer coatings exposed to fs infrared laser irradiation has been performed. The Mo/Si a-periodic multilayer samples were specifically designed with wide reflectivity bandwidth and suitable phase chirp in order to reflect attosecond pulses. %26lt;br%26gt;After irradiation, the mirror surface was analyzed by using an optical microscope and a profilometer. The stoichiometry of the compounds formed at the sample surface after the irradiation was investigated using X-Ray photoemission spectroscopy. The performances of the irradiated samples with the reflected pulse characteristics have been derived via reflectivity and phase measurements.

  • 出版日期2012-1-1