科研之友
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摘要
On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
- 出版日期2008-12
