摘要

Nanoscale photonic structures are patterned directly by exposing a thin film of conjugated polymer to the interference pattern of UV laser beams, thus inducing crosslinking between the polymer molecules in the bright fringes. The crosslinked polymer molecules become indissolvable in organic solvent due to the localized photochemical modification, enabling successful lift-off of the soft grating structures. The resultant nanodevice exhibits excellent chemical and physical stability. This demonstrates the high spatial resolution of the crosslinking process and introduces a direct nanofabrication technique, which may be utilized in the design of optoelectronic and laser devices.

全文