Analytical study on effect of piezoelectric patterns on frequency shift and support loss in ring-shaped resonators for biomedical applications

作者：Liu, Yang; Wang, Dingkang; Wang, Dong F.^*

来源：Microsystem Technologies, 2017, 23(7): 2899-2909.

DOI：10.1007/s00542-016-3112-z

• BEAM RESONATORS
• DISK RESONATOR
• BULK
• GEOMETRY
• WAVE

One of the most vital issue in FBAR is enhancing mass sensitivity and restraining energy loss. A ring-shaped piezoelectric resonator was proposed for biomedical applications. The proposed ring-shaped resonator comprises with a multilayer of Pt/Ti/PZT/Ti/Pt/SiO2, deposited on the silicon-on-insulator wafer and expected to be a contour mode. The ring-shaped resonator reacts to certain voltage vibration with a mass perturbation to get Eigenstate vibration or frequency shifts which could be transferred to electrical signals by converse piezoelectric effect. In this paper, vibration modes with high-frequency shift due to a small mass perturbation of 10 ng are analytical evaluated to achieve a higher sensitivity. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the simulated analysis is conducted by COMSOL from two aspects including (a) the effect of PZT pattern miniaturization and distribution on frequency shift (from viewpoint of vibration mode shape); (b) achieving low support energy loss through analyzing the support displacement. It is found that frequency shift of PZT pattern C with Eigenstate mode 5 is higher than that of others and the support displacement is also small for this combination.

• 出版日期2017-7
• 单位吉林大学