Acoustically Coupled Thickness-Mode AlN-on-Si Band-Pass Filters-Part II: Simulation and Analysis

作者：Thakar Vikram A^*; Pan Wanling; Ayazi Farrokh; Rais Zadeh Mina

来源：IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2012, 59(10): 2270-2277.

DOI：10.1109/TUFFC.2012.2452

In this, the second of two papers, we present numerical simulations and comprehensive analysis of acoustically coupled thickness-mode AlN-on-Si filters. We simulate the scattering parameters of such acoustically coupled filters using commercially available finite element analysis software and compare the simulation results with a set of measurements. The simulations are in good agreement with the measurements, allowing the optimization of filter characteristics. We analyze the filter response under varying geometric parameters and demonstrate that variations in the top electrode geometry allow the design of low-loss filters ( insertion loss <5 dB) with percentage bandwidth up to about 1% and ripple less than 1 dB.

• 出版日期2012-10