Deposition of LaAlO3 films by liquid injection MOCVD using a new [La-Al] single source alkoxide precursor

作者：Manning TD; Loo YF; Jones AC^*; Aspinall HC; Chalker PR; Bickley JF; Smith LM; Critchlow GW

来源：Journal of Materials Chemistry, 2005, 15(33): 3384-3387.

DOI：10.1039/b507004j

The new bimetallic alkoxide complex [LaAl(OPri)(6)((PrOH)-O-i)](2) has been synthesised from the reaction between LaCl3, KAl(OPri)(4) and KOPri in (PrOH)-O-i/toluene. The complex is volatile and has been used as a "single-source'' precursor for the deposition of LaAlO3 by liquid injection MOCVD. The crystal structure of [LaAl(OPri)(6)((PrOH)-O-i)](2) has also been determined.

• 出版日期2005