Unusual stress behaviour of CeO2-doped diamond-like carbon nanofilms

作者：Zhang, Z. Y.^*; Lu, X. C.; Luo, J. B.

来源：Philosophical Magazine Letters, 2008, 88(2): 145-151.

DOI：10.1080/09500830701771947

• TRIBOLOGICAL PROPERTIES
• DEPOSITION
• FILMS
• COATINGS
• MICROSTRUCTURE
• ACTIVATION
• OXIDE

CeO2-doped diamond-like carbon (DLC) films with thicknesses of 180-200 nm were deposited by unbalanced magnetron sputtering. When the CeO2 concentration is in the range 5-8%, the residual compressive stress of the deposited films is reduced by 90%, e.g. from about 4.1 GPa to 0.5 GPa, whereas their adhesion strength increases. These effects are attributed to the dissolution of CeO2 within the DLC amorphous matrix and a widening interface between the DLC film and the Si substrate, respectively.

• 出版日期2008
• 单位大连理工大学; 清华大学