Numerical implementation of the S-matrix algorithm for modeling of relief diffraction gratings

作者：Yaremchuk Iryna^*; Tamulevicius Tomas; Fitio Volodymyr; Grazuleviciute Ieva; Bobitski Yaroslav; Tamulevicius Sigitas

来源：Journal of Modern Optics, 2013, 60(20): 1781-1788.

DOI：10.1080/09500340.2013.861032

• S-matrix algorithm
• RCWA
• relief diffraction grating

A new numerical implementation is developed to calculate the diffraction efficiency of relief diffraction gratings. In the new formulation, vectors containing the expansion coefficients of electric and magnetic fields on boundaries of the grating layer are expressed by additional constants. An S-matrix algorithm has been systematically described in detail and adapted to a simple matrix form. This implementation is suitable for the study of optical characteristics of periodic structures by using modern object-oriented programming languages and different standard mathematical software. The modeling program has been developed on the basis of this numerical implementation and tested by comparison with other commercially available programs and experimental data. Numerical examples are given to show the usefulness of the new implementation.

• 出版日期2013