Accelerated resistive humidity sensing properties of silicon nanoporous pillar array

作者：Jiang Wei Fen^*; Jia Min; Wang Yu Sheng; Li Long Yu; Li Xin Jian

来源：Thin Solid Films, 2009, 517(9): 2994-2996.

DOI：10.1016/j.tsf.2008.11.071

• Silicon nanoporous pillar array (Si-NPA)
• Resistive humidity sensor
• Device response

Silicon nanoporous pillar array (Si-NPA), with micro/nanometer composite structure, was prepared by hydrothermally etching single crystal silicon. Resistive humidity sensors were fabricated through evaporating coplanar interdigital aluminium electrodes on Si-NPA and the humidity sensing properties were tested. It was shown that with relative humidity changing from 11.3% to 94.6%, a resistance device response over one order of magnitude with response time less than 1 s was achieved at frequency of 1 kHz. This extraordinary property was mainly attributed to the unique morphology of Si-NPA, i.e., the regular pillar array provided an effective pathway for vapor transportation and the nanoporous structure of the pillars greatly enlarged the sensing areas.

• 出版日期2009-3-2
• 单位郑州大学; 华北水利水电大学