A Low-Power Integrated Humidity CMOS Sensor by Printing-on-Chip Technology

作者：Lee Chang Hung; Chuang Wen Yu; Cowan Melissa A; Wu Wen Jung; Lin Chih Ting^*

来源：Sensors, 2014, 14(5): 9247-9255.

DOI：10.3390/s140509247

• sensor integration
• inkjet printing
• gas sensor

A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene)/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 mu m CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity sensing of the implemented printing-on-chip sensor system is experimentally tested. The sensor shows a sensitivity of 0.98% to humidity in the atmosphere. The maximum dynamic range of the readout circuit is 9.8 M Omega, which can be further tuned by the frequency of input signal to fit the requirement of the resistance of printed sensor. The power consumption keeps only 154 mu W. This printing-on-chip sensor provides a practical solution to fulfill an ultra-small integrated sensor for the applications in miniaturized sensing systems.

• 出版日期2014-5
• 单位中国科学院电工研究所