A WO3 Nanoparticles NO Gas Sensor Prepared by Hot-Wire CVD

作者：Lin Chih Hung; Chang Shoou Jinn; Hsueh Ting Jen^*

来源：IEEE Electron Device Letters, 2017, 38(2): 266-269.

DOI：10.1109/LED.2016.2647235

• Nitric oxide
• MEMS
• gas sensor
• tungsten oxide

In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when themeasured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 degrees C had the greatest sensitivity. The measured sensitivity for a microelectromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the microheater was 150 degrees C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

• 出版日期2017-2