Deposition characteristics of AlN thin film prepared by the dual ion beam sputtering system

作者：Hu, T L^*; Mao, S W; Cha, C P; Wu, My; Huang, H L; Gan, D

来源：Journal of Electronic Materials, 2007, 36(1): 81-87.

DOI：10.1007/s11664-006-0023-2

• dual ion beam sputtering (DIBS)
• aluminum nitride (AIN) film
• preferred orientation

In this experiment, a radio frequency dual ion beam sputtering (DIBS) system was used to prepare aluminum nitride (AlN) films with a bottom Al electrode on a Si (100) substrate. After systematic testing of the processing variables, a high-quality film with preferred c-axis orientation was grown successfully on the Si (100) substrate with an Al target under 700 eV energy flux, N-2/(N-2 + Ar) ratio of 55%, and 4 x 10(-4) torr in vacuum. The characteristics of the deposited AlN thin films were studied by x-ray diffraction (XRD), scanning electron microscope (SEM), transmission electron microscope (TEM), secondary ion mass spectrometry (SIMS), and electronic spectroscopy for chemical analysis (ESCA). The surface roughness was also measured. It was found that AlN films prepared by DIBS at room temperature are better than those prepared at 300 degrees C, and those prepared with an Al target are better than those prepared with an ANN target. The inferiority of ANN films prepared with AlN targets is due to the AlN bond being broken down by the ion beam source.

• 出版日期2007-1
• 单位中山大学