Development of new electrostatic micro cam system driven by elastic wings

作者：Phuc Hong Pham^*; Lam Bao Dang; Viet Hoang Nguyen; Van Thanh Dau

来源：Microsystem Technologies, 2017, 23(12): 5669-5675.

DOI：10.1007/s00542-017-3422-9

• MICROMECHANISMS
• ACTUATORS

In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage V (pp) = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.

• 出版日期2017-12
• 单位华中科技大学